There are two methods for scanning laser light.
Galvano Scanning Method
This method uses two mirrors to scan laser light in the X and Y directions.
Because the moment of inertia of the mirrors is small, high-speed scanning is possible.
However, the positional accuracy (error) is usually expected to be more than 10 μm.
Stage Drive Method
This method scans by moving the stage, similar to conventional machining equipment, while keeping the optical axis stationary.
Although the scanning speed is quite slow due to the movement of the stage, the positional accuracy (error) depends on the performance of the stage.
Our laser processing machine for drilling uses the stage drive method, allowing processing with machining-equipment-level positional accuracy (±5 μm approximately).
As a result, high precision in both pitch and shape is achieved. Also, there is no variation in the straightness of the holes.